NISSHINBO

New Carbon Material

Glass-like carbon

Glass-like carbon plate (AC-140, AC-140S)
AC-140 is the standard grade of our Glass-like carbon.
AC-140S is the high purity grade.

Glass-like carbon plate (AC-140, AC-140S)

Characteristic

  • Heat resistance up to 2000°C in inert atmosphere
  • Excellent chemical resistance and corrosion resistance
  • Less Particle generation, High purity material
  • Thermal and electrical conductive material
  • Limited thermal expansion, thermal impact resistant material
  • No open porosity and isotropic structure

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Physical Property

  • Item Unit AC-140(AC-140S)
    Bulk Density Mg/m3 1.55
    Open Porosity % 0
    Flexural strength MPa 200
    Elastic Modulus GPa 30
    Electrical Resistivity µΩm 40
    Coefficient of Thermal Expansion /106k 2∼3.4
    Thermal Conductivity W/mk 6.2
    Shore Hardness HS 130
    Ash Content ppm <50(<5)
  • • Metal release from AC-140S
    Element Released Metal Blank Element Released Metal Blank
    Na <0.1 <0.1 Fe <0.1 <0.1
    K <0.1 <0.1 Cr <0.1 <0.1
    Mg <0.1 <0.1 Ni <0.1 <0.1
    Ca <0.1 <0.1 B <0.5 <0.5
    Al <0.5 <0.5


    *Released Metal Ion with HF solution was analyzed

  • • Weight loss of AC-140 in chemicals
    Weight loss of AC-140 in chemicals

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Application

  • Parts for Plasma etch, CVD tools
  • Sputtering target
  • Sample holder for analytical equipments
  • Jigs for glass manufacturing process
  • Heater

Carbon Bead (CB series)

Carbon Bead is a spherical glass-like carbon with smooth surface. Carbon bead has chemical resistance and conductivity as Glass-like carbon AC-140. Various particle sizes are available.
Carbon bead can be applied as filler for several materials.

SEM Image of Carbon Beads
SEM Image of Carbon Beads

Porous Glass-like carbon(AP series)

Porous Glass-like Carbon is a material which consists of carbon beads as shown in SEM image. Porous structures are interconnected. Therefore liquid and gas can flow through them.
Porous-glass like carbon also has high corrosion, temperature resistance and conductivity. Porous Glass-like carbon is expected to be used as filter, chucking part and other applications.

SEM Image of Porous Glass-like carbon AP-100
SEM Image of Porous Glass-like carbon (AP-100)

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Physical Property

Item Unit AP-100
Bulk Density Mg/m3 0.98
Porosity % 45.9
Elastic Modulus GPa 8.8
Flexural Strength MPa 30
Electrical Resistivity Ωm 2.4×10-2
Shore Hardness HS 42
Ash Content ppm 77
Thermal Conductivity W/m·K 1.00

Application

  • Vacuum chucking part
  • Filter
  • Gas diffusion part

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Product & Service Info