• Heat resistance up to 2000°C in inert atmosphere
• Excellent chemical resistance and corrosion resistance
• Less Particle generation, High purity material
• Thermal and electrical conductive material
• Limited thermal expansion, thermal impact resistant material
• No open porosity and isotropic structure

Item	Unit	AC-140(AC-140S)
Bulk Density	Mg/m3	1.55
Open Porosity	%	0
Flexural strength	MPa	200
Elastic Modulus	GPa	30
Electrical Resistivity	µΩm	40
Coefficient of Thermal Expansion	/106k	2∼3.4
Thermal Conductivity	W/mk	6.2
Shore Hardness	HS	130
Ash Content	ppm	<50(<5)

• Metal release from AC-140S

Element	Released Metal	Blank	Element	Released Metal	Blank
Na	<0.1	<0.1	Fe	<0.1	<0.1
K	<0.1	<0.1	Cr	<0.1	<0.1
Mg	<0.1	<0.1	Ni	<0.1	<0.1
Ca	<0.1	<0.1	B	<0.5	<0.5
Al	<0.5	<0.5

*Released Metal Ion with HF solution was analyzed

• Weight loss of AC-140 in chemicals

• Parts for Plasma etch, CVD tools
• Sputtering target
• Sample holder for analytical equipments
• Jigs for glass manufacturing process
• Heater

Carbon Bead (CB series)

Carbon Bead is a spherical glass-like carbon with smooth surface. Carbon bead has chemical resistance and conductivity as Glass-like carbon AC-140. Various particle sizes are available.
Carbon bead can be applied as filler for several materials.

SEM Image of Carbon Beads

Porous Glass-like carbon(AP series)

Porous Glass-like Carbon is a material which consists of carbon beads as shown in SEM image. Porous structures are interconnected. Therefore liquid and gas can flow through them.
Porous-glass like carbon also has high corrosion, temperature resistance and conductivity. Porous Glass-like carbon is expected to be used as filter, chucking part and other applications.

SEM Image of Porous Glass-like carbon (AP-100)

Item	Unit	AP-100
Bulk Density	Mg/m3	0.98
Porosity	%	45.9
Elastic Modulus	GPa	8.8
Flexural Strength	MPa	30
Electrical Resistivity	Ωm	2.4×10-2
Shore Hardness	HS	42
Ash Content	ppm	77
Thermal Conductivity	W/m·K	1.00

• Vacuum chucking part
• Filter
• Gas diffusion part